Refrigerated Thermo-chiller HRZ



  • Proven performance with semiconductor process equipment, with a wide range of features such as high temperature stability, wide temperature range, failure testing, external signal.
  • All models conform to safety standards.
  • Conforms to UL and SEMI specifications, CE marking.
Series Set temperature range Cooling capacity Temperature stability Cooling method Circulating liquid
HRZ -20 to 40
20 to 90
-20 to 90
15kW ±0.1℃ Water-cooled refrigeration Fluorinated liquid, Clear water, Deionized water, Ethylene glycol aqueous solution

SMC Automation (Malaysia) Sdn.Bhd.

SMC Automation (Malaysia) Sdn.Bhd. is the Malaysia subsidiary of SMC Corporation, the world’s largest pneumatic automation products manufacturer which was established in Japan and now has more than 50 years of experience. SMC Malaysia itself was established in 1978, headquartered in Subang Hi-Tech Industrial Park, Klang Valley, and over the decades, has grown to develop a strong sales network throughout Malaysia with 5 branches.

SMC Malaysia’s facilities include a production plant and warehouses storing up to 30,000 variations of the latest advanced pneumatic products of the highest quality, playing an important role in fostering the growth and fulfilling the requirements of industries from a myriad of fields and sectors, including semiconductor, automotive, medical, and petrochemical, just to name a few. Products offered range from valves like air valve, solenoid valve and pneumatic valve, to thermo equipment like thermo chiller and heat exchanger; from actuators, like electric actuator and linear actuator a myriad of electrostatic discharge removal equipment.